Jiangyin Feiyang instrument Co., Ltd.
- Description
-
Total Organic Carbon (TOC) Degradation System for Ultrapure Water for Microelectronic Manufacturing
The combination of UV light and ozone provides a synergistic approach to the reduction of trace organics, the most difficult contaminants to control in pure water systems. As the critical size of integrated circuits continues to decrease and transistor capacity continues to increase, contaminants in the parts-per-trillion range can create defects that affect yield. Organics are polar and are weakly ionized in ultrapure water. This presents a considerable challenge for ion exchange resins. In order to prevent TOC leakage from polished deionizers, it is often necessary to monitor silica (and/or boron) content to determine when regeneration should occur.TOC Degradation
UV light can be used for the efficient degradation of organic matter (commonly referred to as TOC, Total Organic Carbon).
UV degradation of TOC is accomplished through the use of scientifically designed UV systems that work in conjunction with other processes.
Carbon dioxide, a typical by-product of the TOC degradation process, increases the conductivity of water.
While most organic molecules are oxidized to carbon dioxide and water molecules when exposed to UV light, some components with more stable structures are weakly ionized or charged. This is why polished deionization (DI) beds are often placed downstream of the TOC degradation process, removing charged/ionized organics while increasing the resistivity of the water column.
UV technology in conjunction with deionization (DI) and reverse osmosis (RO) processes can reduce TOC in purified water to as low as 1.0 ppb.
The effective UV wavelength used to degrade TOC is 185nm.
TOC Degradation Equipment
Still deciding? Get samples first, Contact US !
Industries
Semiconductor & Microelectronics
In semiconductor manufacturing, even trace organic contamination measured in parts per billion (PPB) can impact production yields. UV-TOC systems remove these organic compounds alongside bacteria and chlorine to help maintain the ultrapure water essential for chip production.
Power & Energy
The quality of demineralised water is critical in power generation. With modern treatment systems using ultrafiltration, Reverse Osmosis (RO) membranes and Electrodeionisation (EDI) units, controlling microbes and residual chlorine has become increasingly complex – especially with RO membranes so sensitive to fouling and chlorine. Our UV-TOC systems solve that challenge.
Inquire Now
We will contact you within one working day. Please pay attention to your email.
Contacts: Felix Xu
Tel: +86-510-86663988
Tel: +86-13771231464
E-mail: xufeiyang@jsfeiyang.com
E-mail: fy@jsfeiyang.com
E-mail：
E-mail：
图片alt标题设置： Feiyang
表单验证提示文本： Content cannot be empty!
循环体没有内容时： Sorry,no matching items were found.
CSS / JS 文件放置地